2026-10-14T15:45:38Z https://www.scidb.cn/oai

10.57760/sciencedb.00zs1 2026-08-19T17:48:23Z

2026-08-19 Preliminary Exploration and Machine Learning Analysis of Growth Process Parameters for YBa₂Cu₃O_{7−δ} Thin Films Based on Small‑Sample Data doi:10.57760/sciencedb.00zs1 en This dataset records the key process parameters and structural characterization data of YBCO high-temperature superconducting thin films prepared using pulsed laser deposition (PLD) technology. The covered process parameters include substrate type, substrate size, laser focal length, target-substrate distance, output voltage, laser frequency, oxygen pressure, growth time, and substrate temperature. The structural indicators include the (005) peak position and the full width at half maximum (FWHM) of the rocking curve, both measured by X‑ray diffraction (XRD). The dataset consists of four CSV files: numeric_peak_position_train and numeric_peak_position_eval for the training and test sets of the (005) peak position, and fwhm_interpolation_train and fwhm_interpolation_eval for the training and test sets of the FWHM. Each file contains the associated growth parameters and characterization data. YBCO high-temperature superconducting thin films; pulsed laser deposition; process parameters; peak position; full width at half maximum 王鑫 张济全 李陈志航 任津生 王宇彤 张玉婷 肖俊成 杨立红 江星宇 袁洁 RESTRICTED dataset http://www.doi.org/10.7498/aps.75.20260159 Science Data Bank