2026-10-15T05:04:50Z https://www.scidb.cn/oai

10.57760/sciencedb.07238 2023-02-07T14:41:29Z

2023-02-07 Statistical perception of chaotic fabrication error and self-adaptive processing decision in ultra-precision optical polishing doi:10.57760/sciencedb.07238 en An ultra-precision surface with equivalent accuracy can be stably realised via proper tool influence function (TIF) selection and modification, even for low-deterministic level tools. Experimental results indicated that the average prediction error in each convergence cycle was reduced to 6.14%. Without manual participation, the root mean square(RMS) of the surface figure of a ϕ100-mm flat mirror was converged to 1.788 nm with only robotic small-tool polishing, and that of a ϕ300-mm high-gradient ellipsoid mirror was converged to 0.008 λ. Additionally, the polishing efficiency was increased by 30% compared with that of manual polishing. The proposed SCP model offers insights that will help achieve advancement in the subaperture polishing process. chaotic error; self-adaptive processing decision ; ultra-precision optical polishing Hanjie Li Songlin Wan Zhenqi Niu Lanya Zhang Hao Guo Qing Lu Chaoyang Wei Jianda Shao PUBLIC https://creativecommons.org/publicdomain/zero/1.0/ dataset Science Data Bank