2026-10-15T00:53:02Z https://www.scidb.cn/oai

10.57760/sciencedb.07500 2023-02-22T09:31:22Z

2023-02-22 Experimental data set for annealing of HfO2 coatings via plasma-enhanced atomic layer deposition doi:10.57760/sciencedb.07500 en In this work, we improved the LIDT of PEALD HfO2 coating by optimizing annealing parameters. This data set includes the test results of various properties of HfO2 coating under different annealing atmospheres (nitrogen and oxygen atmospheres) and annealing temperatures, including optical constants, crystal structure, chemical composition, optical absorption and laser-induced damage threshold.  plasma-enhanced atomic layer deposition; HfO2 coating; anneal; laser-induced damage threshold Zesheng Lin Meiping Zhu Chen Song Tianbao Liu Jianda Shao PUBLIC https://creativecommons.org/publicdomain/zero/1.0/ dataset http://www.doi.org/10.1016/j.jallcom.2023.169443 Science Data Bank