2026-10-12T06:20:21Z https://www.scidb.cn/oai

10.57760/sciencedb.07530 2023-02-23T17:03:29Z

2023-02-23 Low-loss optofluidic waveguides in fused silica enabled by spatially shaped femtosecond laser assisted etching combined with carbon dioxide laser irradiation doi:10.57760/sciencedb.07530 en We demonstrate the fabrication of low-loss optofluidic waveguides encapsulated in fused silica glass using femtosecond laser microfabrication followed by carbon dioxide laser irradiation. Spatially-shaped femtosecond laser-assisted chemical etching is first used to fabricate microchannels with circular cross-sections and a string of open extra-access ports in the glass. Further, the carbon dioxide laser direct writing on the glass surface is used to create a thermal reflow effect of etched glass microstructures for simultaneously polishing all internal surfaces of channels and sealing the extra-access ports. With this effect, the inner surface roughness of the etched microchannels can be reduced to ∼ 40 nm. Finally, a single-mode microfluidic optical waveguide with a propagation loss of ∼ 0.78 dB/cm at 1310 nm is obtained inside the glass by filling a mixture solution of decane and liquid paraffin into a laser-polished microchannel. optofluidic waveguide; femtosecond laser ; laser polishing Jianping Yu Jian Xu Qiaonan Dong Jia Qi Jianfang Chen Aodong Zhang Yunpeng Song Wei Chen Ya Cheng PUBLIC https://creativecommons.org/licenses/by-nd/4.0 dataset http://www.doi.org/10.1016/j.optlastec.2022.108889 Science Data Bank