2026-10-14T09:20:21Z https://www.scidb.cn/oai

10.57760/sciencedb.07531 2023-02-23T17:02:31Z

2023-02-23 High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range doi:10.57760/sciencedb.07531 en We demonstrate high-quality (intrinsic Q factor ∼2.8 × 106) racetrack microresonators fabricated on lithium niobate thin film with a free spectral range (FSR) of ∼86 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around 1550 nm can be red shifted by 92 pm when the electric voltage is raised from −100 V to 100 V. The microresonators with the tuning range spanning over a full FSR are fabricated using photolithography assisted chemo-mechanical etching. microresonators; lithium niobate; electro-optical tuning; chemo-mechanical etching. wang zhe Ya Cheng Zhiwei Fang Gang Chen PUBLIC https://creativecommons.org/publicdomain/zero/1.0/ dataset http://www.doi.org/10.3788/COL202119.060002 Science Data Bank