2026-10-12T20:22:56Z https://www.scidb.cn/oai

10.57760/sciencedb.09186 2023-06-28T09:23:01Z

2023-06-28 Data related to nanosecond-laser conditioning of multilayer dielectric gratings doi:10.57760/sciencedb.09186 en In this study, the integration of nanosecond laser conditioning (NLC) into different manufacturing stages of MLDG was proposed for the first time: on multilayer dielectric films (MLDFs) and final grating products to improve laser-induced damage performance. The results suggest that the remaining nodular ejection pits introduced by the two protocols exhibit a high nanosecond-laser damage resistance, which remains stable when the irradiated laser fluence is more than twice the nanosecond-laser-induced damage threshold (nanosecond-LIDT) of the unconditioned MLDGs. Furthermore, the picosecond-LIDT of the nodular ejection pit conditioned on the MLDFs was ~40 % higher than that of the nodular defects, and the loss of the grating structure surrounding the nodular defects was avoided.  Multilayer dielectric gratings; Nanosecond laser conditioning; Nodular defects; Laser-induced damage threshold Shuai Kun Zhao Yuan'an Liu Xiaofeng Lin Xiangkun Xia Zhilin Qiu Keqiang Li Dawei Gong He Zhou Yan Sun Jian Zhou Li Jiang Youen Dai Yaping Shao Jianda PUBLIC https://creativecommons.org/licenses/by-nc-nd/4.0/ dataset Science Data Bank