2026-10-13T00:07:11Z https://www.scidb.cn/oai

10.57760/sciencedb.11113 2023-09-14T10:54:05Z

2023-09-14 Point spread function of photolithography relay system of mid-spatial frequency error doi:10.57760/sciencedb.11113 en 首先，通过拟合37个Zernike多项式去除低频误差，并从实际表面误差中提取中空间频率误差;将得到的中空频误差导入非球面，导出仿真像面的点扩散函数，计算出相应的半影宽度。 photolithography; relay system; point spread function; mid-spatial frequency error Jiahong Liu PUBLIC https://creativecommons.org/publicdomain/zero/1.0/ dataset http://www.doi.org/10.1117/12.3008049 Science Data Bank