2026-10-15T04:20:39Z https://www.scidb.cn/oai

10.57760/sciencedb.15783 2024-02-01T08:53:28Z

2024-02-01 Angle Monitor of Micromirror Array for Freeform Illumination in Lithography Systems doi:10.57760/sciencedb.15783 en In this paper, we propose an angle monitor to ensure the high-precision tilting of thousands of biaxialmicromirrors. As one of the critical modules for closed-loop control of the two-dimensional micromirror array, the online monitor feeds the monitored high-precision tilt angle back to the processing system. The angle monitor mainly consists of the spot scanning module and the angle detection module. lithography system; freeform illumination system; micromiiror ayyay zhang Huijie Huang Zenghui Yang Jingpei Hu Aijun Zeng PUBLIC https://creativecommons.org/licenses/by/4.0/ dataset http://www.doi.org/10.1063/5.0186334 Science Data Bank