2026-10-14T14:52:14Z https://www.scidb.cn/oai

10.57760/sciencedb.19215 2024-12-31T15:32:25Z

2024-12-31 Ion-beam-sputtered hafnium dioxide laser thin films. doi:10.57760/sciencedb.19215 en This dataset contains information on HfO₂ thin films, which are known for their high laser damage threshold and low absorption properties. The HfO₂ thin films were prepared using dual ion beam sputtering and annealed in the atmosphere at temperatures ranging from 200 to 700°C. The dataset includes systematic characterization of the optical properties, microstructure, film stress, and absorption loss of the HfO₂ thin films at various annealing temperatures. HfO2 thin films; annealing temperature; dual-ion-beam sputtering; surface roughness. Zhao Mingxue Wang Yanzhi RESTRICTED dataset http://www.doi.org/10.1016/j.optmat.2024.116241 http://www.doi.org/10.1117/12.3036897 Science Data Bank