2026-10-12T07:46:56Z https://www.scidb.cn/oai

10.57760/sciencedb.30327 2025-10-24T09:37:20Z

2025-10-24 Improving the performance of Mo/Si/C multilayers through selective substrate bias-assistance doi:10.57760/sciencedb.30327 en Mo/Si/C multilayers were fabricated with bias applied to different layers under the same conditions. The results demonstrate that bias significantly reduces surface and interfacial roughness, with effective improvements observed for each material. selective bias-assisted deposition; Mo/Si/C multilayer; interfacial diffusion Hongxuan Song Wenyun Du Longxun Cao Zhenqi Lu Wenjie Xu Jianda Shao Meiping Zhu PUBLIC https://creativecommons.org/licenses/by-nc-nd/4.0/ dataset Science Data Bank