2026-10-14T22:38:01Z https://www.scidb.cn/oai

10.57760/sciencedb.40114 2026-06-16T17:50:31Z

2026-06-16 Application and Multidimensional Analysis of Atomic Force Microscopy in Thickness Measurement of Graphene Oxide doi:10.57760/sciencedb.40114 en For graphene-based materials, thickness serves as a fundamental characterization parameter. As a crucial measuring tool in nanometrology, atomic force microscope (AFM) provides a direct method for thickness measurement and layer counting. However, the measurement accuracy of this technique is often limited by various factors, including substrate-induced noise and topographic fluctuations of the sample surface, which introduce significant measurement uncertainties and pose challenges for interpreting the true thickness values from the topographic data. The AFM was employed to characterize the morphology of graphene oxide samples on mica substrates. Based on the principles of least squares method and histogram method, a method comparison experiment was designed to realize the measurement, calculation and analysis of the sample thickness. The results indicated that the thickness values measured by the least squares method and the histogram method for graphene oxide are essentially consistent. Furthermore, the measurements obtained by both methods meet the criteria for statistical comparison in experimental evaluation, confirming excellent stability and high reliability of the measured thickness values. graphene oxide; nanometrology; atomic force microscope; histogram method; least squares method; thickness measurement GAO Bin Gao Jiajia Lu Jianguo Wang Guoguo Wen Tianxi Zheng Xiongwen PUBLIC https://creativecommons.org/licenses/by-nc-nd/4.0/ dataset http://www.doi.org/10.16495/j.1006-3757.2026.03.008 Science Data Bank