2026-10-11T03:36:27Z https://www.scidb.cn/oai

10.57760/sciencedb.j00113.00033 2025-12-18T19:02:41Z

2025-12-18 The data of the article "The origin, characteristics, and suppression of residual nitrogen in an MPCVD diamond growth reactor" doi:10.57760/sciencedb.j00113.00033 en The data related to the article “The origin, characteristics, and suppression of residual nitrogen in a MPCVD diamond growth reactor" was published in the journal of Chinese Physics B. It contains the Excel file, which is described below:The growth rate, surface morphology, crystalline quality and nitrogen-vacancy luminecense (NV) have been studied with residual nitrogen or not in the article, including optical emission spectroscopy (OES), Raman spectra, XRD spectra and photoluminescence (PL) sepctra. A quadrupole mass spectrometry was also been applied to detect the leakage. Besides, we have provided an effective way to suppress the residual nitrogen in a slightly leaked system by modifying the susceptor geometry.  MPCVD; Diamond; Residual nitrogen; System leakage tengyan 汤琨 顾书林 刘东阳 卞岳 陈子昂 赵伟康 朱顺明 黄颖蒙 段晶晶 张荣 郑有钭 PUBLIC https://creativecommons.org/licenses/by-nc-nd/4.0/ dataset http://www.doi.org/10.1088/1674-1056/ac7552 Science Data Bank