2026-10-14T11:24:47Z https://www.scidb.cn/oai

10.57760/sciencedb.j00186.000zy 2026-09-24T08:26:59Z

2026-09-24 Data involved in the paper doi:10.57760/sciencedb.j00186.000zy en "collimator magnet edge magnetic field distribution and fitting results.txt"contains the data used for edge magnetic field fitting, corresponding to the data used in Fig. 5.“magnetic field strength along the central ion trajectory(first half).txt” and "magnetic field strength along the central ion trajectory(end half).txt"contain the magnetic field distribution along the central ion trajectory, corresponding to the data used in Fig. 7."ions trajectories obtained by software.txt" contains the ion trajectories calculated based on the magnet model obtained by the fringing magnetic field curve optimization method, corresponding to the data used in the Fig. 8."Comparison of two dimensional without fringe field optimization.txt" contains the comparison of the x-y plane parallelism of the ion beam calculated under two-dimensional and three-dimensional models based on the conventional theoretical analysis method, corresponding to the data used in the upper panel of Fig. 9."magnetic pole boundry based on fringing magnetic field optimize method.txt" contains the magnetic pole boundary obtained by the fringing magnetic field curve optimization method."Comparison of two dimensional with fringe field optimization.txt" contains the relationship of the x-y plane parallelism of the ion beam calculated under two-dimensional and three-dimensional models based on the fringing magnetic field curve optimization method, corresponding to the data used in the lower panel of Fig. 9."Relationship between αi, αo, and the x-z parallelism when collimator magnet meets the design requirements.txt" contains the relationship between αi, αo, and the x-z plane parallelism, where the magnetic pole boundary is derived from the fringing magnetic field curve, i.e., the calculation results of the magnet model corresponding to the file "magnetic pole boundry based on fringing magnetic field optimize method.txt", corresponding to the data used in the upper panel of Fig. 10.“releation between incident angle and exit angle with x-z parallelism based on fringing field curve optimization method.txt' contains the relationship between αi, αo, and the x-z plane parallelism when the magnet meets the design requirements, corresponding to the data used in the lower panel of Fig. 11."ions trajectories obtained after finall optimization.txt" contains the particle motion information corresponding to the final optimization results. This information is obtained from software calculations and corresponds to the data used in the subsequent figures."x-y plane parallelism parameter after final model optimization.txt" contains the x-y plane parallelism of the ion beam after final optimization, corresponding to the data used in Fig. 12."x-z plane parallelism parameter after final model optimization.txt" contains the x-z plane parallelism of the ion beam after final optimization, corresponding to the data used in Fig. 13. Ion implantation technology; Ribbon ion beam; Collimator magnet; Fringing field curves; Parallelism Lin Peng-Tai Long Ji-Dong RESTRICTED dataset Science Data Bank