2026-10-14T17:06:07Z https://www.scidb.cn/oai

10.57760/sciencedb.j00186.00985 2026-05-06T13:44:42Z

2026-05-06 S-parameters of TSV samples under gamma-ray irradiation doi:10.57760/sciencedb.j00186.00985 en Irradiation experiments were performed using a 60Co γ-ray source at the Northwest Institute of Nuclear Technology, with a dose rate of 50 rad(Si)/s. The dose levels were set at 60, 120, and 180 krad(Si). All TSV samples were irradiated without any applied bias. A total of 27 samples were prepared, with nine samples allocated to each of the three TSV types (labeled A1# – A9#, B1# – B9#, and C1# – C9#). For each TSV type, three samples were irradiated at each dose level.The three files s1_cs.txt, s2_cs.txt, and s3_cs.txt correspond to the experimental data for the three samples in the paper. In the .txt files, the first column is frequency; columns 2 and 3 contain the S21 phase and magnitude at 0 kHz; columns 4 and 5 contain the S21 phase and magnitude at 60 kHz; columns 6 and 7 contain the S21 phase and magnitude at 120 kHz; and columns 8 and 9 contain the S21 phase and magnitude at 180 kHz. Total ionizing dose; Through Silicon Via; S-parameters Liangbo RESTRICTED dataset Science Data Bank