2026-10-14T05:45:33Z https://www.scidb.cn/oai

10.57760/sciencedb.j00273.00062 2026-06-25T14:33:24Z

2026-06-25 《Studies on optimization method of chemical mechanical planarization models using grid window refinement strategies》Related Data doi:10.57760/sciencedb.j00273.00062 en This dataset contains three parts of data, presented in the form of Excel with illustrations for the related data of “Studies on optimization method of chemical mechanical planarization models using grid window refinement strategies”, including: 1 Surface morphology curve of silicon wafer; 2. Comparison chart of simulation results and measurement results of surface morphology with GW of 20 μ m and 3-10 μ m; 3. Simulation of Erosion in the M1~M4 hotspot pattern area and simulation of copper wire height in the M5 hotspot pattern area. This part of the data further reflects the detailed information of the published articles in the form of raw measurement and simulation data, mutually confirming and providing better explanations for the published work results.  chemical mechanical planarization; grid window refinement; surface morphology bian yu yang Liu Jianzhong Liu Biqiu PUBLIC https://creativecommons.org/licenses/by-nc-sa/4.0/ dataset http://www.doi.org/10.3724/jfmd.2509066 Science Data Bank